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Absorption and photoconductivity of boron-compensated μc-Si:H

✍ Scribed by A. G. Kazanskii; H. Mell; E. I. Terukov; P. A. Forsh

Book ID
110120339
Publisher
Springer
Year
2000
Tongue
English
Weight
64 KB
Volume
34
Category
Article
ISSN
1063-7826

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\(\mu \mathrm{c}-\mathrm{Si}: \mathrm{H} / \mathrm{a}-\mathrm{Si}: \mathrm{H}\) multilayers have been fabricated with an rf glow-discharge method in which two coupling types of \(\mathrm{if}\) electrodes were used independently by turns without altering the composition of the reactive gases. This sp