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Fabrication and performance of thin film transistors, TFTs, incorporating doped μc-Si source and drain contacts, and boron-compensated μc-Si channel layers

✍ Scribed by S.S. He; M.J. Williams; D.J. Stephens; G. Lucovsky


Book ID
115989233
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
294 KB
Volume
164-166
Category
Article
ISSN
0022-3093

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