An inverted cylindrical magnetron sputtering system operating at 6.5 kW, 85 sccm argon, and 0.27 Pa was used to produce a mid-frequency AC (40 kHz) Al-Ar plasma. Optical emission spectroscopy was used to monitor the plasma emission from 680 nm to 830 nm. Absolute calibration of the emission data was
β¦ LIBER β¦
Absolute populations of argon metastable states in an rf discharge plasma
β Scribed by B. T. Baisova; V. I. Strunin; N. N. Strunina; G. Zh. Khudaibergenov
- Book ID
- 110135446
- Publisher
- Springer
- Year
- 2003
- Tongue
- English
- Weight
- 48 KB
- Volume
- 48
- Category
- Article
- ISSN
- 1063-7842
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