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Ablation and compaction of amorphous SiO2 irradiated with ArF excimer laser

✍ Scribed by Koichi Awazu

Book ID: 116667872
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 576 KB
Volume: 337
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2004.04.008

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