Physical limitations and design for sub-
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Tomohisa Mizuno; Ryuji Ohba
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Article
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1998
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John Wiley and Sons
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English
⚖ 153 KB
We study the physical limitations of MOSFETs around 0.1 mm and introduce a new scaling scenario for sub-0.1-mm MOS devices. At low transverse electric fields, that is, for low carrier densities in SOI devices under low gate drive conditions, it is possible to achieve electron velocity overshoot due