✦ LIBER ✦

A tutorial discussion on measurements of rotational temperature in inductively coupled plasmas

✍ Scribed by Izumi Ishii; Akbar Montaser

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

On nonlocal heating in inductively coupl

✍ Tyshetskiy, Yu O; Smolyakov, A I; Godyak, V A 📂 Article 📅 2002 🏛 Institute of Physics 🌐 English ⚖ 113 KB

Plasma temperature measurement of a low-

✍ Sung, Young-ik; Lim, H. B. 📂 Article 📅 2003 🏛 Royal Society of Chemistry 🌐 English ⚖ 156 KB

Mass spectrometric measurement of ioniza

✍ Crain, Jeffrey S.; Smith, Fred G.; Houk, R.S. 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 887 KB

Langmuir probe measurements of electron

✍ Pei-Qi, Lu; Pei-Zhong, Gong; Tie-Zheng, Lin; Houk, R.S. 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 983 KB

Optical emission measurements of electro

✍ Boffard, John B; Jung, R O; Lin, Chun C; Wendt, A E 📂 Article 📅 2010 🏛 Institute of Physics 🌐 English ⚖ 435 KB

Measurements of relative BCl density in

✍ Fleddermann, C. B.; Hebner, G. A. 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 307 KB