✦ LIBER ✦

Langmuir probe measurements of electron temperature in an inductively coupled plasma

✍ Scribed by Pei-Qi, Lu; Pei-Zhong, Gong; Tie-Zheng, Lin; Houk, R.S.

Book ID: 122835182
Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 983 KB
Volume: 43
Category: Article
ISSN: 0584-8547
DOI: 10.1016/0584-8547(88)80053-3

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Langmuir probe measurement of electron t

Langmuir probe measurement of electron temperature in a supersonic jet extracted from an inductively coupled plasma

✍ Lim, H.B.; Houk, R.S. 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 748 KB

Langmuir probe measurements in an induct

Langmuir probe measurements in an inductively coupled plasma source

✍ Schwabedissen, A.; Benck, E. C.; Roberts, J. R. 📂 Article 📅 1997 🏛 The American Physical Society 🌐 English ⚖ 199 KB

Langmuir probe measurements of potential

Langmuir probe measurements of potential inside a supersonic jet extracted from an inductively coupled plasma

✍ Lim, H.B.; Houk, R.S.; Crain, Jeffrey S. 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 796 KB

Electron temperature distribution in arg

Electron temperature distribution in argon inductively coupled plasma

✍ Nada D. Kovacic 📂 Article 📅 1987 🏛 Springer 🌐 English ⚖ 184 KB

Langmuir probe measurements in an induct

Langmuir probe measurements in an inductively coupled plasma: Electron energy distribution functions in polymerizing fluorocarbon gases used for selective etching of SiO[sub 2]

✍ Gaboriau, Freddy; Peignon, Marie-Claude; Cartry, Gilles; Rolland, Laetitia; Eon, 📂 Article 📅 2002 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 380 KB

Comparison of electron density measureme

Comparison of electron density measurements in planar inductively coupled plasmas by means of the plasma oscillation method and Langmuir probes

✍ Schwabedissen, A; Benck, E C; Roberts, J R 📂 Article 📅 1998 🏛 Institute of Physics 🌐 English ⚖ 251 KB