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A trapezoidal cantilever density sensor based on MEMS technology

✍ Scribed by Li-bo Zhao, Long-qi Xu, Gui-ming Zhang…

Book ID: 120948579
Publisher: SP Zhejiang University Press
Year: 2013
Tongue: English
Weight: 525 KB
Volume: 14
Category: Article
ISSN: 1869-1951
DOI: 10.1631/jzus.C12MNT06

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