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A capacitive RF power sensor based on MEMS technology

✍ Scribed by Fernández, L J; Wiegerink, R J; Flokstra, J; Sesé, J; Jansen, H V; Elwenspoek, M

Book ID: 124079875
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 898 KB
Volume: 16
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/16/7/001

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