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Electric field sensors based on MEMS technology

✍ Scribed by Chao Gong; Shanhong Xia; Kai Deng; Qiang Bai; Shaofeng Chen


Book ID
110626393
Publisher
SP Science Press
Year
2005
Tongue
English
Weight
381 KB
Volume
22
Category
Article
ISSN
0217-9822

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✍ Zhiqiang Zhang; Xiaoping Liao; Lei Han πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 1022 KB

A wideband 8-12 GHz inline RF MEMS power sensor that is based on sensing a certain percentage of the incident microwave power coupled by a MEMS membrane is presented, and the sensor is accomplished with GaAs MMIC technology. In order to improve microwave characteristics and the frequency response of