𝔖 Bobbio Scriptorium
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Advanced Sensor Technology Based on Oxide Thin Film—MEMS Integration

✍ Scribed by Harry L. Tuller; Richard Mlcak

Book ID
110282968
Publisher
Springer US
Year
2000
Tongue
English
Weight
299 KB
Volume
4
Category
Article
ISSN
1385-3449

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📜 SIMILAR VOLUMES

Nitrogen oxide sensors based on thin fil
Nitrogen oxide sensors based on thin films of BaSnO3
✍ Uwe Lampe; Josef Gerblinger; Hans Meixner 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 135 KB

A very promising sensor material to detect nitrogen oxide is \(\mathrm{BaSnO}_{3}\). The mechanism of \(\mathrm{NO}\) sensitivity of this metal oxide is supposed to be a surface reaction process. Thus to get a high gas sensitivity the NO elementary sensor is realized as a thin film. The sensitivity