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A technology for the monolithic fabrication of a pressure sensor and related circuitry

✍ Scribed by C. Cané; F. Campabadal; J. Esteve; M. Lozano; A. Götz; J. Santander; Ch. Burrer; J.A. Plaza; L. Pahun; S. Marco


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
409 KB
Volume
46
Category
Article
ISSN
0924-4247

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