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A silicon based technology for monolithic integration of waveguides and VLSI CMOS circuits

✍ Scribed by U. Hilleringmann; K. Knospe; C. Heite; K. Schumacher; K. Goser

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 227 KB
Volume: 15
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(91)90231-2

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