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A systematic study of the initial electrical and radiation hardness properties of reoxidized nitrided oxides by rapid thermal processing

✍ Scribed by Wei-Shin Lu; Ching-Hsu Chan; Jenn-Gwo Hwu


Book ID
114554722
Publisher
IEEE
Year
1995
Tongue
English
Weight
706 KB
Volume
42
Category
Article
ISSN
0018-9499

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