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A systematic dry etching process for profile control of quantum dots and nanoconstrictions

✍ Scribed by Madnarski Sutikno; Uda Hashim; Zul Azhar Zahid Jamal

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 260 KB
Volume: 38
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2007.07.081

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