✦ LIBER ✦
Applications of profile simulation for thin film deposition and etching processes : C. H. Ting and A. R. Neureuther. Solid St. Technol., 115 (February 1982)
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 121 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0026-2714
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