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A system for deposition of ferroelectric substances by radio-frequency sputtering

✍ Scribed by Z. Surowiak; H. Zajosz; R. Dytry

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 138 KB
Volume: 51
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(78)90300-0

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