Properties of zinc oxide films deposited by a radio-frequency magnetron mode electron cyclotron resonance sputtering system

✍ Scribed by Michio Kadota; Makoto Minakata

• Publisher: John Wiley and Sons
• Year: 1996
• Tongue: English
• Weight: 670 KB
• Volume: 79
• Category: Article
• ISSN: 8756-663X
• DOI: 10.1002/ecjb.4420790707