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A Study on the Effect of Incorporating Nitrogen Ions on Titanium Disilicide Thin Film Formation for ULSI Applications

✍ Scribed by C. W. Lim; A. J. Bourdillon; H. Gong; S. K. Lahiri; K. L. Pey; K. H. Lee

Book ID
110238726
Publisher
Springer
Year
1999
Tongue
English
Weight
119 KB
Volume
18
Category
Article
ISSN
0261-8028

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