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A study on the characteristics of a wafer-polishing process according to machining conditions

โœ Scribed by Jung-Taik Lee; Jong-Koo Won; Eun-Sang Lee

Book ID
107662156
Publisher
Korean Society for Precision Engineering
Year
2009
Tongue
English
Weight
902 KB
Volume
10
Category
Article
ISSN
1229-8557

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