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A study on the fabrication of micro groove on SI wafer using chemical mechanical machining

✍ Scribed by Junmin Park; Haedo Jeong

Publisher: Springer-Verlag
Year: 2005
Tongue: English
Weight: 331 KB
Volume: 19
Category: Article
ISSN: 1738-494X
DOI: 10.1007/bf02916504

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