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A study of the relationship between Si/SiO[sub 2] between interface charges and roughness

✍ Scribed by L. Lai; K. J. Hebert; E. A. Irene

Book ID: 126063759
Publisher: AVS (American Vacuum Society)
Year: 1999
Tongue: English
Weight: 370 KB
Volume: 17
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.590516

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