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A study of the reactions of chlorine and fluorine atoms with SiH2Cl2 and SiHCl3, with ultraviolet photoelectron spectroscopy

✍ Scribed by J.M. Dyke; E.P.F. Lee; A. Morris; L. Nyulászi

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
1000 KB
Volume
66
Category
Article
ISSN
0368-2048

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