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A study of the plasma electronegativity in an argon–oxygen pulsed-dc sputter magnetron

✍ Scribed by You, S D; Dodd, R; Edwards, A; Bradley, J W


Book ID
121440599
Publisher
Institute of Physics
Year
2010
Tongue
English
Weight
840 KB
Volume
43
Category
Article
ISSN
0022-3727

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