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A study of the deposition of polymeric material onto surfaces from fluorocarbon RF plasmas

✍ Scribed by P. J. Astell-Burt; J. A. Cairns; A. K. Cheetham; R. M. Hazel

Publisher: Springer
Year: 1986
Tongue: English
Weight: 447 KB
Volume: 6
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf00565553

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