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A study of surface reactions during the growth of B-doped a-Si:H using the intermittent deposition technique

✍ Scribed by Toshihiro Kamei; Nobuhiro Hata; Akihisa Matsuda


Book ID
115991050
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
293 KB
Volume
198-200
Category
Article
ISSN
0022-3093

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