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A study of relaxation current in high-κ dielectric stacks

✍ Scribed by Zhen Xu; Pantisano, L.; Kerber, A.; Degraeve, R.; Cartier, E.; De Gendt, S.; Heyns, M.; Groeseneken, G.

Book ID: 114617332
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 343 KB
Volume: 51
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2003.822343

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