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A study of high-field electrical conduction and of optical absorption of SiO/SnO2thin films

✍ Scribed by M. Ilyas; C. A. Hogarth; Ravishankar Harani


Publisher
Springer
Year
1984
Tongue
English
Weight
248 KB
Volume
3
Category
Article
ISSN
0261-8028

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P-type transparent conducting antimony-doped tin oxide (ATO) films were successfully fabricated on quartz glass substrates by radiofrequency magnetron sputtering using a 20 mol.% Sb-doped SnO 2 ceramic target. The deposited films were annealed at different temperatures for different durations. Hall