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A study of electronic states in a-SiOx and a-SiNx thin films by infrared, auger electron and X-ray photoelectron spectroscopies

✍ Scribed by S.S. Chao; G. Lucovsky; S.Y. Lin; C.K. Wong; P.D. Richard; D.V. Tsu; Y. Takagi; J.E. Keem; J.E. Tyler; P. Pai

Book ID: 118333533
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 164 KB
Volume: 77-78
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(85)90813-0

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