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A simple bevelling technique for the depth-profiling of deuterium in steels

✍ Scribed by I.S. Giles; C.G. Wilson

Book ID
113278104
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
762 KB
Volume
21
Category
Article
ISSN
0168-583X

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An ion beam technique has been developed that allows the preparation of bevels from semiconducting heteroepitaxial structures with smooth surfaces and very shallow angles between 0.1Γ„ and 0.001Γ„. The bevels are used for AES depth proÐling of heterostructures by the line scan technique. Comparison of