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A silicon test chip for the thermomechanical analysis of MEMS packagings

✍ Scribed by Soeren Majcherek; Thomas Leneke; Soeren Hirsch

Publisher: Springer-Verlag
Year: 2008
Tongue: English
Weight: 576 KB
Volume: 15
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-008-0655-7

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