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Influence of a chip scale package on the frequency response of a MEMS microphone

โœ Scribed by Matthias Winter; Gregor Feiertag; Anton Leidl; Helmut Seidel

Publisher
Springer-Verlag
Year
2009
Tongue
English
Weight
644 KB
Volume
16
Category
Article
ISSN
0946-7076

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The effects of voids on the response of a rubber poker chip sample are examined. A theoretical estimation of the diametral contraction of the sample was performed, using the linear theory of stress analysis. Experimental measurements of the lateral contraction at the middle plane of the poker chip e