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a-Si thin film transistors using dilute-gas plasma-enhanced chemical vapor deposition

✍ Scribed by Wright, S.L.; Rothwell, M.B.; Souk, J.H.; Kuo, J.


Book ID
114535313
Publisher
IEEE
Year
1993
Tongue
English
Weight
271 KB
Volume
40
Category
Article
ISSN
0018-9383

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