Devices and circuits capable of high-voltage operation are necessary for the actuation of micromachined electrostatic structures that require high voltages (20-100 V). These high-voltage devices have traditionally been fabricated using specialized processes. Monolithic integration of the actuators w
A self-test and dynamics characterization circuit for MEMS electrostatic actuators
✍ Scribed by Daniel Fernández; Jordi Madrenas; Jordi Cosp
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 743 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0026-2714
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