✦ LIBER ✦

A self-aligning contact process for MOS LSI

✍ Scribed by Hosoya, T.; Muramoto, S.; Matsuo, S.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A new self-aligning poly-contact technol

✍ Kuninobu, S. 📂 Article 📅 1982 🏛 IEEE 🌐 English ⚖ 695 KB

CASTAM: A process variation analysis sim

✍ Aoki, Y.; Toyabe, T.; Asai, S.; Hagiwara, T. 📂 Article 📅 1984 🏛 IEEE 🌐 English ⚖ 657 KB

Development of a new self-aligning conta

✍ Lavery, J.; Armstrong, M.B.; Gamble, H.S. 📂 Article 📅 1987 🏛 IEEE 🌐 English ⚖ 997 KB

A new self-aligning process for whole-wa

✍ Blamire, M.G.; Evetts, J.E.; Hasko, D.G. 📂 Article 📅 1989 🏛 IEEE 🌐 English ⚖ 374 KB

Automatic mask alignment in MOS/LSI proc

📂 Article 📅 1971 🏛 Elsevier Science 🌐 English ⚖ 197 KB

Characterization of a self-aligned RTP t

✍ W. Kaplan; S.-L. Zhang; H. Norström; M. Östling; A. Lindberg 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 548 KB