Characterization of a self-aligned RTP titanium disilicide MOS process: titanium-silicon dioxide interaction

✍ Scribed by W. Kaplan; S.-L. Zhang; H. Norström; M. Östling; A. Lindberg

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 548 KB
• Volume: 53
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(91)90283-p