A self-aligned 1-µm-channel CMOS technology with retrograde n-well and thin epitaxy

✍ Scribed by Yuan Taur; Hu, G.J.; Dennard, R.H.; Terman, L.M.; Chung-Yu Ting; Petrillo, K.E.

• Book ID: 114595050
• Publisher: IEEE
• Year: 1985
• Tongue: English
• Weight: 582 KB
• Volume: 32
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1985.21930