A Self-Aliglned 1-/spl mu/m-Channel CMOS Technology with Retrograde n-Well and Thin Epitaxy

✍ Scribed by Yuan Taur; Hu, G.J.; Dennard, R.H.; Terman, L.M.; Chung-Yu Ting; Petrillo, K.E.

• Book ID: 119798421
• Publisher: IEEE
• Year: 1985
• Tongue: English
• Weight: 962 KB
• Volume: 20
• Category: Article
• ISSN: 0018-9200
• DOI: 10.1109/jssc.1985.1052284