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A Route to Three-Dimensional Structures in a Microfluidic Device: Stop-Flow Interference Lithography

✍ Scribed by Ji-Hyun Jang; Dhananjay Dendukuri; T. Alan Hatton; Edwin L. Thomas; Patrick S. Doyle

Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
637 KB
Volume
46
Category
Article
ISSN
0044-8249

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Detachment Lithography of Photosensitive
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✍ Junghoon Yeom; Mark A. Shannon 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 785 KB

## Abstract A technique to create arrays of micrometer‐sized patterns of photosensitive polymers on the surface of elastomeric stamps and to transfer these patterns to planar and nonplanar substrates is presented. The photosensitive polymers are initially patterned through detachment lithography (D