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A review of focused ion beam milling techniques for TEM specimen preparation

✍ Scribed by L.A. Giannuzzi; F.A. Stevie

Book ID
108480941
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
495 KB
Volume
30
Category
Article
ISSN
0968-4328

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Preparation of cross-sectional TEM sampl
Preparation of cross-sectional TEM samples for low-angle ion milling
✍ McCaffrey, J.P.; Barna, A. πŸ“‚ Article πŸ“… 1997 πŸ› John Wiley and Sons 🌐 English βš– 177 KB πŸ‘ 2 views

The ideal ion-milled transmission electron microscope (TEM) sample would contain large, thin areas in selected regions, minimal top and bottom surface amorphization, and minimal preferential etching of adjacent materials. This desire has led to studies of these effects and improvements in designs an