Cross-sectional specimen preparation from ICs downside for SEM and TEM-failure analyses using focused ion beam etching

✍ Scribed by F. Altmann; D. Katzer

• Book ID: 114086731
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 278 KB
• Volume: 343-344
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(98)01683-6