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A Practical, Self-Catalytic, Atomic Layer Deposition of Silicon Dioxide

✍ Scribed by Julien Bachmann; Robert Zierold; Yuen Tung Chong; Roland Hauert; Chris Sturm; Rüdiger Schmidt-Grund; Bernd Rheinländer; Marius Grundmann; Ulrich Gösele; Kornelius Nielsch

Book ID: 102728951
Publisher: John Wiley and Sons
Year: 2008
Tongue: English
Weight: 500 KB
Volume: 47
Category: Article
ISSN: 0044-8249
DOI: 10.1002/anie.200800245

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