A planar thin-film SQUID of high inductive coupling constant
β Scribed by S.I. Bondarenko; V.V. Kravchenko; N.M. Lemeshko; E.A. Golovanev
- Book ID
- 103049737
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 140 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0011-2275
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## Abstract This article describes the complete experimental characterization of a 10βmm long planar transmissionβline transformer (TLT) in a multilayered high dielectric constant film structure. The multilayered configuration was obtained by deposition of a high dielectric constant BaTiO~3~ (BTO)
The etching of Pb(Zr Ti )O (PZT) thin films was performed using HBr /Ar gas in an inductively coupled plasma. The etch rate and etch profile of the PZT films were investigated as a function of the gas concentration of the HBr /Ar mixture. In addition, the etch parameters, including coil power, dc b