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A photoacoustic study of thermal conductivity annealing curves for a silicon substrate implanted with Si ions

✍ Scribed by Nobuya Takabatake; Takeshi Kobayashi; Yoshiyuki Show; Tomio Izumi

Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 997 KB
Volume: 86
Category: Article
ISSN: 8756-663X
DOI: 10.1002/ecjb.10034

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