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A paradigm for damage recovery in ion-implanted silicon

✍ Scribed by G.F. Cerofolini; L. Meda; G. Ottaviani

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Damage Profiles in Ion Implanted Silicon

✍ Tkachev, V. D. ;Hölzer, G. ;Chelyadinskii, A. R. 📂 Article 📅 1984 🏛 John Wiley and Sons 🌐 English ⚖ 185 KB

Ion implantation damage recovery in GaN

✍ I.O. Usov; D. Koleske; K.E. Sickafus 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 182 KB

Ion Implantation Damage Effects in Silic

✍ Eberle, David E. 📂 Article 📅 1970 🏛 IEEE 🌐 English ⚖ 611 KB

Lattice damage in ion implanted silicon-

✍ T.E. Haynes; O.W. Holland 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 373 KB

Damage evolution in low-energy ion impla

✍ Karmouch, R.; Anahory, Y.; Mercure, J.-F.; Bouilly, D.; Chicoine, M.; Bentoumi, 📂 Article 📅 2007 🏛 The American Physical Society 🌐 English ⚖ 364 KB

Damage depth profiles for high energy io

✍ Tohru Hara; Takeshi Muraki; Masataka Sakurai; Satoru Takeda; Inoue Morio; Fuji S 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 558 KB