A novel fabrication technique of FBAR de
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Linh Mai; Jae-young Lee; Van-Su Pham; Giwan Yoon
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Article
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2008
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John Wiley and Sons
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English
β 226 KB
## Abstract In this study, we present a novel fabrication technique of FBAR devices as a feasibility study for mobile broadband WiMAX applications. This novel technique features the formation of very thinβfilm Cr adhesion layers between W and SiO~2~ film layers in the Bragg reflectors, particularly