A novel fabrication technique of FBAR devices for mobile broadband WiMAX applications

✍ Scribed by Linh Mai; Jae-young Lee; Van-Su Pham; Giwan Yoon

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 226 KB
• Volume: 50
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/mop.23088

✦ Synopsis

Abstract

In this study, we present a novel fabrication technique of FBAR devices as a feasibility study for mobile broadband WiMAX applications. This novel technique features the formation of very thin‐film Cr adhesion layers between W and SiO~2~ film layers in the Bragg reflectors, particularly to enhance the adhesion in‐between. As a result, the resonances were found to occur at 2.7–3.0 GHz. In addition, excellent resonance characteristics were achieved in terms of return loss and Q‐factor. This finding indicates that the proposed fabrication technique can be useful for the future mobile WiMAX applications. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 375–378, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.23088