A New Way to Silicon Microstructuring with Electrochemical Etching
✍ Scribed by Christophersen, M. ;Merz, P. ;Quenzer, J. ;Carstensen, J. ;F�ll, H.
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 196 KB
- Volume
- 182
- Category
- Article
- ISSN
- 0031-8965
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