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A New Way to Silicon Microstructuring with Electrochemical Etching

✍ Scribed by Christophersen, M. ;Merz, P. ;Quenzer, J. ;Carstensen, J. ;F�ll, H.


Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
196 KB
Volume
182
Category
Article
ISSN
0031-8965

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