Polymer thin films are widely used as coatings and interlevel dielectrics in microelectronic applications. In thin-film structures, stresses are generated due to interaction with adjacent layers and film shrinkage due to solvent evaporation or curing. This causes polymer chain orientation resulting
β¦ LIBER β¦
A new technique for measuring thickness of thin solid films
β Scribed by Professor C. C. Desai
- Publisher
- John Wiley and Sons
- Year
- 1987
- Tongue
- English
- Weight
- 377 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0232-1300
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