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A new silicon micromachining method using SOI/SDB technology

✍ Scribed by Shi-Ji Lu; Zheng Zheng; Qin-Yi Tong

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 212 KB
Volume: 23
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(90)87069-u

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